E84 Emulator

Get Control's (GCI) E84 Emulator is the world's leading tester for development, implementation and qualification of products that must comply with the SEMI® E84 Standard. It provides the industry-standard automated test plans that are utilized by virtually every 300mm FAB and equipment manufacturer worldwide. GCI testers are the only solutions that guarantee 300mm factory automation interoperability.

The E84 Emulator provides automated procedures for testing the parallel input/output (PI/O) control signals of active and passive entities. SEMI® E84 defines the control signals to transfer wafer carriers between automated material handling systems (AMHS) and production equipment in wafer fabrication facilities.

The E84 Emulator connects to a Microsoft® Windows-based laptop computer, through a standard USB port. The E84 Emulator Application is compatible with WinXP, Win7, and Win10.

A graphical user interface (GUI) is provided that supports automated and manual test modes for active and passive emulation. In the automated test mode, data is entered for the testers name, test date, and equipment information. Automated test mode provides 20 active mode and 18 passive mode tests which may be individually enabled or disabled by the user. Static tests which allow the user to verify that labeled DB-25 plugs for each loadport exist and that they are mounted in the correct location. A figure of the labeling and location may be optionally displayed on the GUI.

Functional tests are provided to verify single handoff load, single handoff unload, handoff available, emergency stop, timeouts, passive equipment port sensors, and the +24V supply voltage. Timing diagrams of the control signals for various tests may be optionally displayed on the GUI. 

In automated test mode, tests plans and results may be optionally saved. Saved files include both an ASCII text file and a PDF file formatted for printing. These files contains all of the equipment information entered by the user, along with information about each test provided by the E84 Emulator Application. Test details include test title, results, failure messages, and any comments entered by the user during testing. Saved test plans may also be recalled to resume testing.

Manual test mode provides a menu that allows the user to toggle the state of the parallel output signals while continuously displaying the state of the parallel input signals.